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Proceedings Paper

Development of a compact high-load PZT-ceramic long-travel linear actuator with picometer resolution for active optical alignment applications
Author(s): H. Marth; B. Lula
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Paper Abstract

This paper describes a high-force PZT-ceramic based linear actuator for long-travel, high resolution applications. Different modes of operation offer high bandwidth dither, step and constant velocity slew motion. The drive is self-locking and does not expend energy to hold a position. This development was originally undertaken for applications in the semiconductor industry and mature serial production actuators are now embedded in machinery to actively collimate heavy optic assemblies weighing 10's of kg in multiple axes with nanometer resolution.

Paper Details

Date Published: 6 July 2006
PDF: 5 pages
Proc. SPIE 6273, Optomechanical Technologies for Astronomy, 62731K (6 July 2006); doi: 10.1117/12.671984
Show Author Affiliations
H. Marth, Physik Instrumente GmbH & Co. KG (Germany)
B. Lula, Physik Instrumente L.P. (United States)

Published in SPIE Proceedings Vol. 6273:
Optomechanical Technologies for Astronomy
Eli Atad-Ettedgui; Joseph Antebi; Dietrich Lemke, Editor(s)

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