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Proceedings Paper

Recent development of micropore optics using MEMS technologies
Author(s): Yuichiro Ezoe; Masaki Koshiishi; Makoto Mita; Kazuhisa Mitsuda; Yoshitaka Ishisaki; Akio Hoshino; Zhen Yang; Takayuki Takano; Harutaka Mekaru; Ryutaro Maeda
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Paper Abstract

Recent development of the extremely light-weight micro pore optics based on the semiconductor MEMS (Micro Electro Mechanical System) technologies is reported. Anisotropic chemical wet etching of silicon (110) wafers were utilized, in order to obtain a row of smooth (111) side walls vertical to the wafer face and to use them as X-ray mirrors. To obtain high performance mirrors with smooth surfaces and a high aspect ratio, several modifications were made to our previous manufacturing process shown in Ezoe et al. (2005). After these improvements, smooth surfaces with rms roughness of the order of angstroms and also a high aspect ratio of 20 were achieved. Furthermore, a single-stage optic was designed as a first step to multi-stage optics. A mounting device and a slit device for the sample optic were fabricated fully using the MEMS technologies and evaluated.

Paper Details

Date Published: 13 June 2006
PDF: 9 pages
Proc. SPIE 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, 62661B (13 June 2006); doi: 10.1117/12.670736
Show Author Affiliations
Yuichiro Ezoe, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Masaki Koshiishi, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Makoto Mita, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Kazuhisa Mitsuda, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Yoshitaka Ishisaki, Tokyo Metropolitan Univ. (Japan)
Akio Hoshino, Tokyo Metropolitan Univ. (Japan)
Zhen Yang, Tokyo Metropolitan Industrial Technology Research Institute (Japan)
Takayuki Takano, National Institute of Advanced Industrial Science and Technology (Japan)
Harutaka Mekaru, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6266:
Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
Martin J. L. Turner; Günther Hasinger, Editor(s)

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