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Proceedings Paper

Large sputtering coating plant working with a mode of scan
Author(s): Weiyuan Guo
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Paper Abstract

Introduction to design thought of a large vacuum sputtering coating plant for astronomical telescope. The coating plant is square and all working cells are installed on a holder inside the chamber. When the plant door open, the holder with working cells is hauled out of chamber, then maintaining, repair and installing mirrors are very easy. Metal film and dielectric film are made with DC and RF magnetron sputtering respectively. The largest diameter of mirror is 1600 mm and the diameter of sputtering target is 160 mm. The whole mirror is coated by the polar coordinate scanning through computer control. There are three advantage: large mirror is sputtered with small power supply, so the cost is saved; By computer controlling working parameter of scanning, better uniformity can achieve; scanning sputtering can correct the mirror surface.

Paper Details

Date Published: 6 July 2006
PDF: 9 pages
Proc. SPIE 6273, Optomechanical Technologies for Astronomy, 62732P (6 July 2006); doi: 10.1117/12.670158
Show Author Affiliations
Weiyuan Guo, National Astronomical Observatories, Nanjing Institute of Astronomical Optics and Technology (China)


Published in SPIE Proceedings Vol. 6273:
Optomechanical Technologies for Astronomy
Eli Atad-Ettedgui; Joseph Antebi; Dietrich Lemke, Editor(s)

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