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Proceedings Paper

Examination of quantum cascade laser source for a MEMS-scale photo-acoustic chemical sensor
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Paper Abstract

Photoacoustic spectroscopy is a useful monitoring technique that is well suited for trace gas detection. The technique also possesses favorable detection characteristics when the system dimensions are scaled to a micro-system design. The objective of present work is to incorporate two strengths of the Army Research Laboratory (ARL), Quantum Cascade Laser (QCL) source development and chemical and biological sensing into a monolithic micro-electromechanical systems (MEMS) photoacoutic trace gas sensor. Past examination of a one quarter scale photoacoustic (PA) macro-cell has indicated a pathway to incorporate a photoacoustic resonance structure in a micro-mechanical platform. Initial studies involve the incorporation of a QCL source operating @ ~3.45 μm into the PA macro-cell system as a means to discern proper operational characteristics in relation to the photoacoustic cell design. Results will be presented describing beam conditioning, modulation control and wavelength selection associated with the QCL source. Some preliminary information regarding MEMS-scale designs based off of hybrid concept, involving commercially available microphone and fully fabricated MEMS photoacoustic resonator will be described.

Paper Details

Date Published: 19 May 2006
PDF: 9 pages
Proc. SPIE 6218, Chemical and Biological Sensing VII, 621805 (19 May 2006); doi: 10.1117/12.670040
Show Author Affiliations
David A. Heaps, U.S. Army Research Lab. (United States)
Paul M. Pellegrino, U.S. Army Research Lab. (United States)


Published in SPIE Proceedings Vol. 6218:
Chemical and Biological Sensing VII
Patrick J. Gardner; Augustus W. Fountain, Editor(s)

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