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Proceedings Paper

Advanced dry and steam laser cleaning of opaque and transparent critical substrates
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Paper Abstract

Dry and steam laser cleaning, DLC and SLC, of nano-and micro-contaminant particles from UV/vis opaque and transparent critical substrates has been studied in front-side laser illumination geometry with the help of time-resolved optical techniques and broadband photoacoustic spectroscopy using a nanosecond 10.6-μm TEA CO2-laser and different absorbing energy transfer media (ETM) fluids. Corresponding basic DLC and SLC mechanisms for removal of nano- and micro-particles from opaque and transparent critical substrates as well as parameters of explosive removal of ETM fluids have been determined and discussed.

Paper Details

Date Published: 7 June 2006
PDF: 12 pages
Proc. SPIE 6261, High-Power Laser Ablation VI, 62610D (7 June 2006); doi: 10.1117/12.669613
Show Author Affiliations
Sergey Kudryashov, Arkansas State Univ. (United States)
Shishir Shukla, Arkansas State Univ. (United States)
Univ. of Memphis (United States)
Kevin Lyon, Arkansas State Univ. (United States)
Susan D. Allen, Arkansas State Univ. (United States)
Univ. of Memphis (United States)


Published in SPIE Proceedings Vol. 6261:
High-Power Laser Ablation VI
Claude R. Phipps, Editor(s)

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