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Proceedings Paper

An analysis of ultrashort pulse laser micromachining parameters for the optimization of shallow hole drilling
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Paper Abstract

Using a factorial design of experiments approach with ANOVA, laser drilling experiments were performed on the semiconductor mercury-cadmium-telluride (HgCdTe). A commercial CPA femtosecond laser system operating at 775nm was used for the experiments. The test variables include laser parameters such as pulse length, fluence, beam shaping using apertures, assist gas, vacuum, and others. The response variable examined for optimization include hole size, hole depth, and melt effects. The analysis yielded an empirical formula for predicting laser drilling effects.

Paper Details

Date Published: 7 June 2006
PDF: 12 pages
Proc. SPIE 6261, High-Power Laser Ablation VI, 62612D (7 June 2006); doi: 10.1117/12.669402
Show Author Affiliations
Benjamin R. Campbell, Pennsylvania State Univ. (United States)
Vladimir V. Semak, Pennsylvania State Univ. (United States)
Jeffrey G. Thomas, Pennsylvania State Univ. (United States)

Published in SPIE Proceedings Vol. 6261:
High-Power Laser Ablation VI
Claude R. Phipps, Editor(s)

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