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Proceedings Paper

The effect on Doppler frequency shift by measurement prism 3-dimension motion
Author(s): Zhi Zhong; Jiubin Tan; Hongfang Chen; Hongwen Ma
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Paper Abstract

Displacement measurement with laser interferometer is based on measuring the laser Doppler frequency shift that a beam of radiation undergoes upon reflection from measuring prism connected to a moving stage. The principle error in fast ultra-precision laser heterodyne interferometric measurement is proposed in this paper. Only 1-dimension motion of the measuring prism is usually thought about in the laser Doppler frequency shift calculation. The formula of laser Doppler frequency shift taken in account of 3-dimension motion of measurement prism is established, and the error introduced by the velocity of other dimensions is analyzed. There is a lack of the second-order in v/c in traditional model of displacement measurement with laser heterodyne interferometric. The distance error lead by the second-order in v/c in Doppler frequency is analyzed and emulated, the emulation result shows that there is a residual cumulative error that is up to 17.7nm when the highest speed is up to 1m/s and the displacement is long to 3m. The residual cumulative error is cumulatived.

Paper Details

Date Published: 20 January 2006
PDF: 6 pages
Proc. SPIE 6027, ICO20: Optical Information Processing, 602721 (20 January 2006); doi: 10.1117/12.668192
Show Author Affiliations
Zhi Zhong, Harbin Institute of Technology (China)
Jiubin Tan, Harbin Institute of Technology (China)
Hongfang Chen, Harbin Institute of Technology (China)
Hongwen Ma, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6027:
ICO20: Optical Information Processing
Yunlong Sheng; Songlin Zhuang; Yimo Zhang, Editor(s)

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