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Proceedings Paper

Design and analysis of x-ray microscope of four mirrors working at grazing incidence
Author(s): Jiasheng Hu; Lingling Zhao; Xiang Li
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Paper Abstract

In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. But, Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by the materials, it is very difficult to image objects in the x ray region. Conventional imaging methods are hardly suitable to x-ray range. Generally, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper, non-coaxial grazing reflective imaging KB and KBA microscope systems are discussed in detail, and an x-ray microscope consisting of four mirrors working at grazing incidence is designed. It is an anastigmatic system, and the oblique angle of the image is evidently decreased. The resolution of 5-7 can be obtained within 2 field of view. And finally we also make analysis of the key problems that are met in the processing of manufacturing this system are analyzed.

Paper Details

Date Published: 1 February 2006
PDF: 7 pages
Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 60340M (1 February 2006); doi: 10.1117/12.668106
Show Author Affiliations
Jiasheng Hu, Dalian Univ. of Technology (China)
Lingling Zhao, Dalian Univ. of Technology (China)
Xiang Li, Dalian Univ. of Technology (China)


Published in SPIE Proceedings Vol. 6034:
ICO20: Optical Design and Fabrication
James Breckinridge; Yongtian Wang, Editor(s)

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