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Proceedings Paper

The optical properties of titanium oxide films prepared by dc reactive magnetron sputtering
Author(s): Li-Jian Meng; V. Teixeira; H. N. Cui; Frank Placido; Z. Xu; M. P. dos Santos
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Paper Abstract

TiO2 thin films were deposited on the glass substrates by dc reactive magnetron sputtering technique at different sputtering pressures. The films prepared at low pressures have an anatase phase, and the films prepared at high pressures have an amorphous phase. The optical properties were studied by measuring the transmittance and the ellipsometric spectra. The optical constants of the films in the visible range were obtained by fitting the transmittance combined with the ellipsometry measurements using the classical model with one oscillator. The films prepared at the pressure higher than 6 x 10-3 mbar show a volume inhomogeneity. This volume inhomogeneity has been calculated by fitting the transmittance and the ellipsometric spectra.

Paper Details

Date Published: 1 February 2006
PDF: 6 pages
Proc. SPIE 6034, ICO20: Optical Design and Fabrication, 603409 (1 February 2006); doi: 10.1117/12.668092
Show Author Affiliations
Li-Jian Meng, Instituto Superior de Engenharia do Porto (Portugal)
Univ. do Minho (Portugal)
V. Teixeira, Univ. do Minho (Portugal)
H. N. Cui, Univ. do Minho (Portugal)
Frank Placido, Univ. of Paisley (United Kingdom)
Z. Xu, Beijing Jiaotong Univ. (China)
M. P. dos Santos, Univ. de Évora (Portugal)

Published in SPIE Proceedings Vol. 6034:
ICO20: Optical Design and Fabrication
James Breckinridge; Yongtian Wang, Editor(s)

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