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Proceedings Paper

Integrated Mach-Zehnder micro-interferometer for gas trace remote sensing
Author(s): M. Chiarini; G. G. Bentini; M. Bianconi; A. Cerutti; G. Pennestri; Pengfei Wang; Lin She; P. Mazzoldi; C. Sada
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Paper Abstract

The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides; the phase shift between the two optical paths has been obtained, without moving parts, by applying a suitable electric field. The whole device is 60mm long, has a 0.5x1mm2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4μm-1.1μm) will be presented. The performance of the device, evaluated on standard radiation sources, demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications, spanning from Space Technology, Earth observation for Environment monitoring, to Safety and Security applications.

Paper Details

Date Published: 2 February 2006
PDF: 5 pages
Proc. SPIE 6031, ICO20: Remote Sensing and Infrared Devices and Systems, 603106 (2 February 2006); doi: 10.1117/12.667896
Show Author Affiliations
M. Chiarini, Carlo Gavazzi Space SpA (Italy)
G. G. Bentini, Istituto per la Microelettronica e Microsistemi (Italy)
M. Bianconi, Istituto per la Microelettronica e Microsistemi (Italy)
A. Cerutti, Istituto Microelettronica e Microsistemi (Italy)
G. Pennestri, Carlo Gavazzi Space SpA (Italy)
Pengfei Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Lin She, Carlo Gavazzi Space SpA (Italy)
P. Mazzoldi, INFM Sez. di Padova (Italy)
C. Sada, INFM Sez. di Padova (Italy)


Published in SPIE Proceedings Vol. 6031:
ICO20: Remote Sensing and Infrared Devices and Systems
Jingshan Jiang; O. Yu. Nosach; Jiaqi Wang, Editor(s)

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