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Proceedings Paper

The study on the epoxy resin compound x-ray refractive lens
Author(s): Jingqiu Liang; Zichun Le; Liangqiang Peng; Weibiao Wang; Futing Yi; Bisheng Quan; Jingsong Yao; Jun Zhang; Wen Dong; Ming Xuan
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Paper Abstract

In this paper, the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first, the theoretical results of the structure parameters for such a device are given. Then, the fabrication technologies are presented. They are deep soft X-ray lithography, mold-manufacturing and molding. The material of X-ray photoresist is PMMA, the mold is made of silicone rubber, and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.

Paper Details

Date Published: 7 February 2006
PDF: 6 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320U (7 February 2006); doi: 10.1117/12.667887
Show Author Affiliations
Jingqiu Liang, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Zichun Le, Zhejiang Univ. of Technology (China)
Liangqiang Peng, Institute of High Energy Physics (China)
Weibiao Wang, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Futing Yi, Institute of High Energy Physics (China)
Bisheng Quan, Zhejiang Univ. of Technology (China)
Jingsong Yao, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Jun Zhang, Changchun Institute of Optics, Fine Mechanics, and Physics (China)
Wen Dong, Zhejiang Univ. of Technology (China)
Ming Xuan, Changchun Institute of Optics, Fine Mechanics, and Physics (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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