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Proceedings Paper

Electromechanical characteristics analysis and simulation of grating light modulator
Author(s): Xu Yan; Shanglian Huang; Jie Zhang; Zhihai Zhang
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Paper Abstract

In this paper, a 27um×27um novel grating light modulator supported by cantilevers has been presented, and it can be fabricated using silicon surface-micromachining technology. The structure and basic operation principle of grating light modulator is introduced. The structure is composed of grating plate, address electrode and four cantilevers, the grating plate, which is supported by four cantilevers placed around, is overhung about one wavelength of incidence light from the underlying address electrode, it is actuated like a piston by electrostatic force, and piston-type motion of grating can be used to modulate phase of incident light, therefore, the grating light modulator array is a potential device for projection displays and relevant devices for its intrinsic characteristics. Mechanics model is developed for deducing the deformation equation, the relationship between the electromechanical characteristics of the device and the geometrical parameters and material performance is analyzed, such as pull-in voltage, resonance frequency and step response time. Electromechanical coupled simulation is done by Coventorware, then, more reasonable geometrical parameters are obtained for fabricated in the next step.

Paper Details

Date Published: 7 February 2006
PDF: 7 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320S (7 February 2006); doi: 10.1117/12.667885
Show Author Affiliations
Xu Yan, Chongqing Univ. (China)
Shanglian Huang, Chongqing Univ. (China)
Jie Zhang, Chongqing Univ. (China)
Zhihai Zhang, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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