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Proceedings Paper

A study on high isolation RF MEMS switch
Author(s): Lingling Lin; Guoqing Hu; Zonghua Lin; Wenyan Liu
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Paper Abstract

A new type of high isolation RF MEMS switch is studied in this paper. The structure of cantilever beam with electrodes Sandwiched between Si and SiO2 layers has been evaluated. The top and bottom dielectric materials separate two conducting electrodes when actuated. Therefore the reliability has been improved greatly. The curves of the cantilever beam and the voltage have been simulated.

Paper Details

Date Published: 7 February 2006
PDF: 8 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320Q (7 February 2006); doi: 10.1117/12.667883
Show Author Affiliations
Lingling Lin, Xiamen Univ. (China)
Guoqing Hu, Xiamen Univ. (China)
Zonghua Lin, Xiamen Univ. (China)
Wenyan Liu, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS

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