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Proceedings Paper

The deflection and frequency analysis of micro silicon cantilever beam actuated by electrostatic force
Author(s): Guoqing Hu; Guangwen Chen; Wenyan Liu
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Paper Abstract

The deflection analysis of a micro silicon cantilever beam actuated by electrostatic force is presented in this paper, from analysis, it has been shown that the force applied on the cantilever varies according to the deflection of cantilever, so, it is difficult to solve the differential equation of the deflection, especially, and the load is changing. A new increment method to solve this problem is presented, the cantilever is divided into a number of small segments, it is assumption that every segment has a constant concentrated force, and the electrostatic force is loaded on step by step, when the segment and load step is small enough, the simulation result will be limited to accuracy. In the same time, the frequency of the cantilever is also obtained.

Paper Details

Date Published: 7 February 2006
PDF: 9 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320P (7 February 2006); doi: 10.1117/12.667875
Show Author Affiliations
Guoqing Hu, Xiamen Univ. (China)
Guangwen Chen, Xiamen Univ. (China)
Wenyan Liu, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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