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Proceedings Paper

Measuring the profile and out-of-plane motion of microstructures using microscopic interferometry with FTM analysis
Author(s): Xiaodong Hu; Gang Liu; Tong Guo; Chunguang Hu; Xiaotang Hu
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Paper Abstract

Microscopic interferometry is up to now the most widely used technique for microstructure surface profiling, and is also capable of measuring out-of-plane motion and deflection of microstructures with stroboscopic illumination. In this paper we put forward a stroboscopic Mirau microscopic interferometer system, which is built of commercially available components and instruments based on virtual instrument technology. An improved Fourier transform method (FTM) is described, and two interferograms with different phase shifting are processed for achieving reliable phase demodulation. The system is applied to the measurement of microcantilever surface profile and out-of-plane deflection and motion. Finally, experiment results are compared with that of temporal phase-shifting method for validating the process method.

Paper Details

Date Published: 7 February 2006
PDF: 8 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320N (7 February 2006); doi: 10.1117/12.667872
Show Author Affiliations
Xiaodong Hu, Tianjin Univ. (China)
Gang Liu, Tianjin Univ. (China)
Tong Guo, Tianjin Univ. (China)
Chunguang Hu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 6032:
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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