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Proceedings Paper

Refractive microlensarray made of silver-halide sensitized gelatin (SHSG) etched by enzyme with SLM-based lithography
Author(s): Xiaowei Guo; Mingyong Chen; Jianhua Zhu; Yanqin Ma; Jinglei Du; Yongkang Guo; Chunlei Du
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Paper Abstract

A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled digital-micromirror-device(DMDTM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of etching SHSG with enzyme and theoretical analysis for deep etching are also discussed in detail, and the detailed quantitative experiments on the processing procedures are conducted to determine optimum technique parameters. A good linear relationship within a depth range of 4μm was experimentally obtained between exposure dose and relief depth. At last, the microlensarray with 256.8μm radius and 2.572μm depth was achieved. This method is simple, cheap and the aberration in processing procedures can be corrected in the step of designing mask, so it is a practical method to fabricate good continuous profile for low-volume production.

Paper Details

Date Published: 7 February 2006
PDF: 10 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320K (7 February 2006); doi: 10.1117/12.667869
Show Author Affiliations
Xiaowei Guo, Sichuan Univ. (China)
Mingyong Chen, Sichuan Univ. (China)
Jianhua Zhu, Sichuan Univ. (China)
Yanqin Ma, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Chunlei Du, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS

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