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Proceedings Paper

Theory and simulation of MEMS deformable mirror
Author(s): Jinliang Yan; Yinnv Zhao; Fen Yu; Youliang Zhu; Hongzhao Zhang
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Paper Abstract

A novel MEMS deformable mirror was proposed and characterized. Actuator deflection was simulated using one dimensional electromechanical model. The diaphragm was modeled as a double cantilever beam, with a gap-dependent electrostatic actuating force. The effect of the structural parameters and actuated voltages on the deflection of the actuator was closely studied. A lumped parameter model for predicting the reset transient motion of the actuator, taking into account tensile forces and viscous air damping via squeeze film theory, was used to determine the reset time. The results show that the elastic diaphragm thickness, the elastic diaphragm length and gap spacing have a strong effect on the deflection, the actuator displays typical nonlinear deflection versus voltage characteristics and electromechanical instability at elevated voltages. The reset transient motion of the actuator is an exponential decay oscillation line, the reset time is about 0.14μs.

Paper Details

Date Published: 7 February 2006
PDF: 7 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 60320J (7 February 2006); doi: 10.1117/12.667868
Show Author Affiliations
Jinliang Yan, Yantai Normal Univ. (China)
Yinnv Zhao, Yantai Normal Univ. (China)
Fen Yu, Yantai Normal Univ. (China)
Youliang Zhu, Yantai Normal Univ. (China)
Hongzhao Zhang, Yantai Normal Univ. (China)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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