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Proceedings Paper

Design research of nanopositioner based on SPM and its simulation of FEM
Author(s): Zhenyu Zhang; Hongqi Li; Hongxiu Zhou; Linan Li; Xiangjun Liu
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Paper Abstract

A novel nanopositioning stage was designed according to the scanning property of SPM with flexure hinge as kinematic structure and piezoelectric ceramic as actuator. Kinetic precision and X directional area of nanopositioner are 1.55nm and 26.4 micron, respectively, which is demonstrated by kinetic analysis and finite element method FEM simulation. Designed nanopositioner based on SPM moves at 3 dimensions with nanometer scale and its motion of X, Y, and Z directions is decoupled and isotropic. Furthermore, frame of nanopositioner is simple and manufacturing is convenient, which will have broad prospect in the field of nanopositioning and nanotracing.

Paper Details

Date Published: 7 February 2006
PDF: 5 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 603209 (7 February 2006); doi: 10.1117/12.667854
Show Author Affiliations
Zhenyu Zhang, Tianjin Univ. (China)
Hongqi Li, Tianjin Univ. (China)
Hongxiu Zhou, Tianjin Univ. (China)
Linan Li, Tianjin Univ. (China)
Xiangjun Liu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 6032:
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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