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Proceedings Paper

MEMS-based thin palladium membrane microreactors
Author(s): S.-Y. Ye; S. Tanaka; M. Esashi; S. Hamakawa; T Hanaoka; F. Mizukami
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Paper Abstract

We microfabricated a MEMS (Micro Electro Mechanical System) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The membranes were characterized by permeation experiments with hydrogen, nitrogen, and helium at temperature ranging from 200°C to 250°C. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2 s-1 at 250°C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250°C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. We also carried out the hydrogenation of 1-butene at 250°C using the developed microreactor. The results of long term test of about three months suggest that Pd membrane microreactor has a potential to be used in practical applications.

Paper Details

Date Published: 7 February 2006
PDF: 10 pages
Proc. SPIE 6032, ICO20: MEMS, MOEMS, and NEMS, 603207 (7 February 2006); doi: 10.1117/12.667851
Show Author Affiliations
S.-Y. Ye, National Institute of Advanced Industrial Science and Technology (Japan)
S. Tanaka, Tohoku Univ. (Japan)
M. Esashi, Tohoku Univ. (Japan)
S. Hamakawa, National Institute of Advanced Industrial Science and Technology (Japan)
T Hanaoka, National Institute of Advanced Industrial Science and Technology (Japan)
F. Mizukami, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6032:
ICO20: MEMS, MOEMS, and NEMS
Masayoshi Esashi; Zhaoying Zhou, Editor(s)

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