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Proceedings Paper

Uniformity of DLC deposited by pulsed vacuum arc ion source
Author(s): Qian Mi; Changlong Cai; Yixin Yan; Haifeng Liang
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Paper Abstract

In this paper, the diamond-like carbon (DLC) film is deposited by pulsed vacuum arc ion source. A great lot of technical experiments are done with various technique parameters, including main loop voltage, pulse frequency, ion source structure and size, substrate height and magnetic intensity, for finding out the influence of technical parameters on film uniformity. Meantime, a handy film thickness measurement instrument is used to measure the distribution of film thickness. Finally, the influences of technique parameters on film uniformity are achieved.

Paper Details

Date Published: 23 January 2006
PDF: 5 pages
Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290K (23 January 2006); doi: 10.1117/12.667688
Show Author Affiliations
Qian Mi, Xi’an Institute of Technology (China)
Changlong Cai, Xi’an Institute of Technology (China)
Yixin Yan, Xi’an Institute of Technology (China)
Haifeng Liang, Xi’an Institute of Technology (China)

Published in SPIE Proceedings Vol. 6029:
ICO20: Materials and Nanostructures
Wei Lu; Jeff Young, Editor(s)

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