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Proceedings Paper

Preparation and characterization of ceramic thin films, structures, and nanocrystals using CO2 laser annealing treatment
Author(s): C. Goyes; A. Casas; E. Solarte; F. Sequeda; A. Devia
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Paper Abstract

Yttria Stabilized Zirconia (YSZ) and Silicon Carbide (SiC) nanolayers were deposited on several substrates using a Magnetron Sputtering system with YSZ and SiC targets. The combined effects of pressure and RF-DC power and post-annealing with CO2 laser irradiation on the thin film microstructure was investigated by Infrared Spectroscopy (IR), Atomic Force Microscopy (AFM), X-Ray Photoelectron Spectroscopy (XPS), and Lateral Force Microscopy (LFM). It has been found that the microstructure and optical properties of these materials can be controlled by laser power and irradiation time. Furthermore, shorter annealing times were needed as compared with conventional annealing procedures, results indicate that this processes could be used to produce suitable nanolayers for industrial applications.

Paper Details

Date Published: 23 January 2006
PDF: 6 pages
Proc. SPIE 6029, ICO20: Materials and Nanostructures, 60290D (23 January 2006); doi: 10.1117/12.667674
Show Author Affiliations
C. Goyes, Univ. del Valle (Colombia)
A. Casas, Univ. del Valle (Colombia)
E. Solarte, Univ. del Valle (Colombia)
F. Sequeda, Univ. del Valle (Colombia)
A. Devia, Univ. Nacional (Colombia)

Published in SPIE Proceedings Vol. 6029:
ICO20: Materials and Nanostructures
Wei Lu; Jeff Young, Editor(s)

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