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Proceedings Paper

A low loss planar waveguide by using organic-inorganic Sol-Gel
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Paper Abstract

An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23dB/cm at 632.8nm wavelength. A directional coupler was also realized.

Paper Details

Date Published: 28 January 2006
PDF: 5 pages
Proc. SPIE 6025, ICO20: Optical Communication, 60251O (28 January 2006); doi: 10.1117/12.667073
Show Author Affiliations
Fu-Fei Pang, Shanghai Institute of Optics and Fine Mechanics (China)
Xui-You Han, Shanghai Institute of Optics and Fine Mechanics (China)
Hai-Wen Cai, Shanghai Institute of Optics and Fine Mechanics (China)
Rong-Hui Qu, Shanghai Institute of Optics and Fine Mechanics (China)
Zu-Jie Fang, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6025:
ICO20: Optical Communication
Yun-Chur Chung; Shizhong Xie, Editor(s)

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