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Proceedings Paper

Fabrication of vertical coupled polymer microring resonator
Author(s): Wenyuang Deng; Shulin E; Degui Sun; Pengfei Wang; Daming Zhang; Wu Xu
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Paper Abstract

In this paper, a new fabricating strategy for polymer microring resonators vertically coupled to a bus waveguide is developed. A carefully engineered Al masking process is utilized to compensate the local concave of the buried waveguide formed by polymer spin-coating, realizing perfectly flat top surface of the buried bus waveguide. A serial of the vertically coupled polymer microring resonator showing excellent topology was fabricated with this strategy. The resonance phenomenon is oberved in a PMMA-based microring resonators using this fabricating strategy .The suggested approach is suitable to fabricate vertically coupled polymer micro-resonators.

Paper Details

Date Published: 28 January 2006
PDF: 6 pages
Proc. SPIE 6025, ICO20: Optical Communication, 60251F (28 January 2006); doi: 10.1117/12.667062
Show Author Affiliations
Wenyuang Deng, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Shulin E, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Degui Sun, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Pengfei Wang, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Daming Zhang, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)
Jilin Univ. (China)
Wu Xu, Changchun Institute of Optics, Fine Mechanics and Physics, CAS (China)


Published in SPIE Proceedings Vol. 6025:
ICO20: Optical Communication
Yun-Chur Chung; Shizhong Xie, Editor(s)

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