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Proceedings Paper

Design and fabrication of soft X-ray blazed diffraction gratings
Author(s): Ying Liu; Xin Tan; Xiangdong Xu; Yilin Hong; Shaojun Fu
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Paper Abstract

Diffraction gratings are designed for grazing-incidence operation in the soft x-ray spectral region. The efficiencies for various diffraction orders are simulated as a function of angle of incidence and blazed angles. According to the beat phenomenon, the grating pattern with double-frequency on the same substrate is recorded in a holographic way. The blazed grating will be fabricated using holography and ion beam etching method. The primary experimental results are presented. This kind of blazed grating is a key element used as a beam splitter of soft x-ray Mach-Zehnder interferometer, which is a new tool to diagnose the plasma generated by the laser-based inertial confinement fusion.

Paper Details

Date Published: 9 December 2005
PDF: 7 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242N (9 December 2005); doi: 10.1117/12.666970
Show Author Affiliations
Ying Liu, Univ. of Science and Technology of China (China)
Xin Tan, Univ. of Science and Technology of China (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)

Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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