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Proceedings Paper

Design, fabrication, and characterization of an ultraviolet silicon sensor
Author(s): D. Berman-Mendoza; M. Aceves-Mijares; L. R. Berriel-Valdos; Z. Yu; C. Falcony; C. Domínguez-Horna; Jorge Pedraza
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Paper Abstract

In this work a Silicon/Silicon Rich Oxide (SRO) Ultraviolet detector is designed, fabricated and characterized. This device increases the silicon detection range to the ultraviolet region (200-300nm). Besides the fabrication process of this detector is compatible with standard silicon technology that makes it cheaper than commercial UV detectors.

Paper Details

Date Published: 9 December 2005
PDF: 6 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60242L (9 December 2005); doi: 10.1117/12.666968
Show Author Affiliations
D. Berman-Mendoza, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
M. Aceves-Mijares, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
L. R. Berriel-Valdos, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
Z. Yu, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)
C. Falcony, The Advanced Study and Research Ctr. of National Polytechnical Institute (Mexico)
C. Domínguez-Horna, National Ctr. of Microelectronics, Institute of Microelectronics of Barcelona (Spain)
Jorge Pedraza, Instituto Nacional de Astrofísica, Óptica y Electrónica (Mexico)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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