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Proceedings Paper

Vacuum annealing effects on properties of ITO films prepared by reactive low voltage ion plating technique
Author(s): Ying Xu; Jinsong Gao; Xuanming Zheng; Xiaoyi Wang; Tongtong Wang; Hong Chen
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Paper Abstract

With reactive low voltage ion plating technique, ITO (indium oxide doped with tin) films were deposited on glass substrates by using ITO pellet with a composition of 90 wt.% In2O3 and 10 wt.% SnO2 without extra heating. The post annealing process was done in vacuum with different annealing temperature at 100, 200, 300 and 400°C for 2 hours, respectively. The effects of vacuum annealing on structural, optical and electrical properties of the ITO film deposited by RLVIP were studied in detail. The results showed that the crystalline of the film was improved with the higher temperature. The increase of the annealing temperature improved the infrared reflectivity from 30% to 80% over 8~14μm of the infrared atmosphere window, and a simultaneous variation in the optical transmission of the visible spectral region occurred. In addition, sheet resistance of ITO films had contrary changing trend with the IR reflectance, as well.

Paper Details

Date Published: 9 December 2005
PDF: 6 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602428 (9 December 2005); doi: 10.1117/12.666953
Show Author Affiliations
Ying Xu, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jinsong Gao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xuanming Zheng, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Xiaoyi Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Tongtong Wang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hong Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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