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Proceedings Paper

The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer
Author(s): Xiaodong Wu; Feng Lei; Toyohiko Yatagai
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Paper Abstract

We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film, the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change, the interferogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.

Paper Details

Date Published: 9 December 2005
PDF: 6 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60241N (9 December 2005); doi: 10.1117/12.666868
Show Author Affiliations
Xiaodong Wu, Changchun Institute of Optics Fine Mechanics and Physics (China)
Feng Lei, You and I Technology Co. (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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