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Proceedings Paper

Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer
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Paper Abstract

Wavelength tuning interferometry can distinguish interference signals from different surfaces in frequency space. The optical thickness variation of each layer of a multiple-surface object was measured by a new tunable phase measuring algorithm which can efficiently compensate for the frequency detuning of the interference signals. A two-layer object consisting of Lithium Niobate (LNB) wafer on the supporting glass parallel was measured by the new tunable algorithm in a Fizeau interferometer. Experimental results show that the optical thickness variation of the top wafer was measured with an error of λPV over a 70 mm diameter aperture.

Paper Details

Date Published: 9 December 2005
PDF: 6 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60240O (9 December 2005); doi: 10.1117/12.666830
Show Author Affiliations
Jan Burke, CSIRO Telecommunication and Industrial Physics (Australia)
Kenichi Hibino, National Institute of Advanced Industrial Science and Technology (Japan)
Ryohei Hanayama, Univ. of Tokyo (Japan)
Bonzenko F. Oreb, CSIRO Telecommunication and Industrial Physics (Australia)


Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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