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Proceedings Paper

Study of micro-displacement measuring system with double F-P interference cavities
Author(s): Xiufang Yang; W. L. Wei; Xiaoming Wang
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Paper Abstract

A kind of Micro-displacement measuring instrument using double interference cavities is designed. It is based on F-P interference wave length One of interference cavities is reference cavity, the other is measuring cavity. One reflect surface of reference cavity is installed with piezoelectric ceramics, One reflect surface of measuring cavity is erected with an object to be measured. When the central wavelengths in reference Fabry-Perot interference and in measuring Fabry-Perot interference are overlapped, there are the maximum light signal outputs. Based on the relationship between the transmission spectrum central wave length and its interference cavity length, this measuring instrument can be used to realize the real time measurement of Nano-grade micro-displacement. Using simi- conductor laser as the light resource can obtain the required wavelength values and its variation scopes. It can be seen from the measured results that the measured error is not over 1.5nm. Such a precision can satisfy the precision requirements as in the fields of precision mechanical processing, photoelectronic processing and Nano- grade measuring technology.

Paper Details

Date Published: 9 December 2005
PDF: 5 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60240M (9 December 2005); doi: 10.1117/12.666828
Show Author Affiliations
Xiufang Yang, Xi'an Univ. of Technology (China)
W. L. Wei, Xi'an Univ. of Technology (China)
Xiaoming Wang, Xi'an Municipal Government Administration Committee (China)

Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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