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Proceedings Paper

Design and calibration of large dynamic range optical metrology systems
Author(s): John E. Greivenkamp
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Paper Abstract

Optical metrology requiring a large dynamic range places several requirements on the design and operation on the instrument. In addition to being able to detect the part or wavefront shape to the required range and precision, the measurements must also be calibrated to remove the induced errors associated with operation in a non-null fashion. This paper demonstrates the need for this calibration, and presents the results of a system calibration of a non-null interferometric measurement.

Paper Details

Date Published: 9 December 2005
PDF: 8 pages
Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602403 (9 December 2005); doi: 10.1117/12.666804
Show Author Affiliations
John E. Greivenkamp, College of Optical Sciences/Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 6024:
ICO20: Optical Devices and Instruments
James C. Wyant; X. J. Zhang, Editor(s)

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