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Proceedings Paper

Compact and stress-released piston tip-tilt mirror
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Paper Abstract

Devices based on SOI technology are subject to bow due to residual stress induced by the buried oxide. We have designed and fabricated a compact tunable piston tip-tilt mirror device in which the shape and the arrangement of the suspension beams result in both a reduced stress in the suspension beams and an optically flat mirror. The piston tip-tilt mirror is characterized by an accurate vertical displacement of up to 18 μm @ 80 V with good repeatability, and a tip-tilt of up to 2 mrad @ 50 V.

Paper Details

Date Published: 21 April 2006
PDF: 6 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860H (21 April 2006); doi: 10.1117/12.666511
Show Author Affiliations
W. Noell, Univ. of Neuchâtel (Switzerland)
T. Overstolz, Swiss Ctr. for Electronics and Microtechnology, Inc. (Switzerland)
R. Stanley, Swiss Ctr. for Electronics and Microtechnology, Inc. (Switzerland)
N. F. de Rooij, Univ. of Neuchâtel (Switzerland)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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