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Proceedings Paper

Segmented MEMS deformable-mirror technology for space applications
Author(s): Michael A. Helmbrecht; Thor Juneau; Matthew Hart; Nathan Doble
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Paper Abstract

This paper presents MEMS deformable-mirror technology under development at Iris AO. The hybrid approach uses surface-micromachining techniques to fabricate actuator arrays. High-fill-factor mirror arrays are flip-chip bonded on top of these actuator arrays. The single-crystal-silicon mirror segments provide robust substrates for optical coating with excellent surface quality (6-20 nm rms surface-figure errors). The hexagonally close-packed segments are 350 μm on a side, and can thus provide high-spatial frequency corrections in a small form factor. High-stroke actuation of greater than >7.5 μm has been experimentally verified while keeping actuation voltages within reasonable bounds (<130 V). Three electrodes under each actuator allow for piston/tip/tilt motion. An open-loop controller has been demonstrated to position a 37-segment array resulting in a flattened array with only 19 nm rms of surface figure error.

Paper Details

Date Published: 18 May 2006
PDF: 7 pages
Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622305 (18 May 2006); doi: 10.1117/12.666353
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Thor Juneau, SiTime, Inc. (United States)
Matthew Hart, Owlstone Ltd. (United Kingdom)
Nathan Doble, Iris AO, Inc. (United States)

Published in SPIE Proceedings Vol. 6223:
Micro (MEMS) and Nanotechnologies for Space Applications
Thomas George; Zhong-Yang Cheng, Editor(s)

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