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Proceedings Paper

Micro-analytical systems for national security applications
Author(s): R. W. Cernosek; A. L. Robinson; D. Y. Cruz; D. R. Adkins; J. L. Barnett; J. M. Bauer; M. G. Blain; J. E. Byrnes; S. M. Dirk; G. R. Dulleck; J. A. Ellison; J. G. Fleming; T. W. Hamilton; E. J. Heller; S. W. Howell; R. J. Kottenstette; P. R. Lewis; R. P. Manginell; M. W. Moorman; C. D. Mowry; R. G. Manley; M. Okandan; K. Rahimian; G. J. Shelmidine; R. J. Shul; R. J. Simonson; S. S. Sokolowski; J. J. Spates; A. W. Staton; D. E. Trudell; D. R. Wheeler; W. G. Yelton
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Paper Abstract

Sandia National Laboratories has a long tradition of technology development for national security applications. In recent years, significant effort has been focused on micro-analytical systems - handheld, miniature, or portable instruments built around microfabricated components. Many of these systems include microsensor concepts and target detection and analysis of chemical and biological agents. The ultimate development goal for these instruments is to produce fully integrated sensored microsystems. Described here are a few new components and systems being explored: (1) A new microcalibrator chip, consisting of a thermally labile solid matrix on an array of suspended-membrane microhotplates, that when actuated delivers controlled quantities of chemical vapors. (2) New chemical vapor detectors, based on a suspended-membrane micro-hotplate design, which are amenable to array configurations. (3) Micron-scale cylindrical ion traps, fabricated using a molded tungsten process, which form the critical elements for a micro-mass analyzer. (4) Monolithically integrated micro-chemical analysis systems fabricated in silicon that incorporate chemical preconcentrators, gas chromatography columns, detector arrays, and MEMS valves.

Paper Details

Date Published: 18 May 2006
PDF: 13 pages
Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622306 (18 May 2006); doi: 10.1117/12.666329
Show Author Affiliations
R. W. Cernosek, Sandia National Labs. (United States)
A. L. Robinson, Sandia National Labs. (United States)
D. Y. Cruz, Intel Corp. (United States)
D. R. Adkins, Defiant Technologies (United States)
J. L. Barnett, Sandia National Labs. (United States)
J. M. Bauer, Draper Lab. (United States)
M. G. Blain, Sandia National Labs. (United States)
J. E. Byrnes, Compa Industries, Inc. (United States)
S. M. Dirk, Sandia National Labs. (United States)
G. R. Dulleck, Sandia National Labs. (United States)
J. A. Ellison, Sandia National Labs. (United States)
J. G. Fleming, Sandia National Labs. (United States)
T. W. Hamilton, Sandia National Labs. (United States)
E. J. Heller, Sandia National Labs. (United States)
S. W. Howell, Sandia National Labs. (United States)
R. J. Kottenstette, Sandia National Labs. (United States)
P. R. Lewis, Sandia National Labs. (United States)
R. P. Manginell, Sandia National Labs. (United States)
M. W. Moorman, Sandia National Labs. (United States)
C. D. Mowry, Sandia National Labs. (United States)
R. G. Manley, Rochester Institute of Technology (United States)
M. Okandan, Sandia National Labs. (United States)
K. Rahimian, Sandia National Labs. (United States)
G. J. Shelmidine, Sandia National Labs. (United States)
R. J. Shul, Sandia National Labs. (United States)
R. J. Simonson, Sandia National Labs. (United States)
S. S. Sokolowski, Sandia National Labs. (United States)
J. J. Spates, Ktech Corp. (United States)
A. W. Staton, Sandia National Labs. (United States)
D. E. Trudell, Sandia National Labs. (United States)
D. R. Wheeler, Sandia National Labs. (United States)
W. G. Yelton, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 6223:
Micro (MEMS) and Nanotechnologies for Space Applications
Thomas George; Zhong-Yang Cheng, Editor(s)

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