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Proceedings Paper

Integration of MEMS phase shifters with CMOS control circuitry
Author(s): Ali Darwish; Tom Farmer; Kamal Ali; Mona Zaghloul; H. A. Hung; E. Viveiros
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Paper Abstract

A CMOS digital microcircuit, utilizing sub-micron technology, was designed for the purpose of providing integrated control circuitry to an array of high-voltage micro-electromechanical systems (MEMS) switch based phase shifter devices. The grid of MEMS phase shifters is part of a phased array antenna system. The phase of each element of the array is controlled via the CMOS microcircuit. This paper presents the design, physical layout, and the measured test results for CMOS digital control circuit that has been fabricated using the MOSIS Integrated Circuit Fabrication Service. The circuit converts serial data to parallel outputs to reduce number of control lines and lower the cost of wiring the phased array. In addition, discrete digital control circuitry for loading phase shifts into each MEMS device is presented.

Paper Details

Date Published: 18 May 2006
PDF: 7 pages
Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622303 (18 May 2006); doi: 10.1117/12.666102
Show Author Affiliations
Ali Darwish, Army Research Lab. (United States)
Tom Farmer, The George Washington Univ. (United States)
Kamal Ali, Jackson State Univ. (United States)
Mona Zaghloul, The George Washington Univ. (United States)
H. A. Hung, Army Research Lab. (United States)
E. Viveiros, Army Research Lab. (United States)


Published in SPIE Proceedings Vol. 6223:
Micro (MEMS) and Nanotechnologies for Space Applications
Thomas George; Zhong-Yang Cheng, Editor(s)

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