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Proceedings Paper

MEMS-based force-detected nuclear magnetic resonance (FDNMR) spectrometer
Author(s): Choonsup Lee; Mark C. Butler; Ramez A. Elgammal; Thomas George; Brian Hunt; Daniel P. Weitekamp
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Paper Abstract

The motivation for the work reported is portable NMR spectroscopy of liquids and solids with higher sensitivity than inductive detection and without the need for tuned elements specific to the frequency of each isotope observed. The fabrication and assembly of a BOOMERANG force-detected nuclear magnetic resonance (NMR) spectrometer is reported. The design is optimal for samples of ~ 50 micron diameter and realizes tolerances of ~1 micron in the Si and ferromagnetic parts. Optical lithography, electrodeposition, reactive ion etching, and release of the moving part by solution etching are key methods used. Resistance to delamination of the ferromagnetic material was achieved by Cr/Au deposition prior to electrodeposition of 85/15 Co:Ni.

Paper Details

Date Published: 5 May 2006
PDF: 7 pages
Proc. SPIE 6223, Micro (MEMS) and Nanotechnologies for Space Applications, 622302 (5 May 2006); doi: 10.1117/12.665692
Show Author Affiliations
Choonsup Lee, California Institute of Technology (United States)
Mark C. Butler, California Institute of Technology (United States)
Ramez A. Elgammal, California Institute of Technology (United States)
Thomas George, ViaLogy Corp. (United States)
Brian Hunt, Jet Propulsion Lab. (United States)
Daniel P. Weitekamp, California Institute of Technology (United States)


Published in SPIE Proceedings Vol. 6223:
Micro (MEMS) and Nanotechnologies for Space Applications
Thomas George; Zhong-Yang Cheng, Editor(s)

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