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Proceedings Paper

An integrated approach for photonic crystal inspection and characterization
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Paper Abstract

Photonic crystals are attractive optical materials for controlling and manipulating light. They are of great interest for both fundamental and applied research, and are expected to find commercial applications soon. In this work digital holography, white light interferometry and atomic force microscopy have been applied to the inspection and characterization of 1D and 2D nanofabricated LiN photonic crystals. Periodic pattern with periods ranging form several microns to a fraction of micron have been accurately analysed. Optical methods allow exploring relatively large areas while atomic force microscopy is well suited for high-resolution inspection of the small features.

Paper Details

Date Published: 27 April 2006
PDF: 8 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880A (27 April 2006); doi: 10.1117/12.664930
Show Author Affiliations
B. Tiribilli, Istituto Sistemi Complessi, CNR (Italy)
P. Ferraro, Istituto Nazionale di Ottica Applicata, CNR (Italy)
S. Grilli, Istituto Nazionale di Ottica Applicata, CNR (Italy)
G. Molesini, Istituto Nazionale di Ottica Applicata, CNR (Italy)
M. Vannoni, Istituto Nazionale di Ottica Applicata, CNR (Italy)
M. Vassalli, Istituto Sistemi Complessi, CNR (Italy)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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