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Proceedings Paper

A 2D MEMS stage for optical applications
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Paper Abstract

A 2D MEMS platform for a microlens scanner application is reported. The platform is fabricated on an SOI wafer with 50 μm thick device layer. Entire device is defined with a single etching step on the same layer. Through four S-shaped beams, the device is capable of producing nonlinear 2D motion from linear 1D translation of two pairs of comb actuator sets. The device has a clear aperture of 2mm by 2mm, which is hallowed from the backside for micro-optics assembly. In this paper, a numerical device model and its validation via experimental characterization results are presented. Integration of the micro-optical components with the stage is also discussed. Additionally, a new driving scheme to minimize the settling time of the device in DC operation is explored.

Paper Details

Date Published: 21 April 2006
PDF: 8 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618603 (21 April 2006); doi: 10.1117/12.664777
Show Author Affiliations
Caglar Ataman, Koc Univ. (Turkey)
Yves Petremand, Univ. of Neuchatel (Switzerland)
Wilfried Noell, Univ. of Neuchatel (Switzerland)
Hakan Ürey, Koc Univ. (Turkey)
Marc Epitaux, Intel Corp. (United States)
Nico F. de Rooij, Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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