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Proceedings Paper

LMI based robust H∞ control theory for nanofeeding under large feeding force
Author(s): Xuxiao Hu; Dong Ji
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Paper Abstract

On the basis of the research on nanometer drive parts under large feeding force and the thermal expansion principle, the nano precision drive parts based on the semiconductor refrigeration equipment was designed. In order to get a better feed precision, considering that the nano feeding under large feeding force has some open air temperature random disturbance phenomenon which influence the feed precision, LMI-based robust H∞ control scheme was presented. And the LMI-based robust H∞ control scheme used here can realize the purpose of obtaining a good control of nano feeding under large feeding to enhance the response speed and the robustness. When the open air temperature changes within 0.3°C, the control precision without LMI-based robust H∞ control scheme is 15 nm and the control precision under LMI-based robust H∞ control scheme has arrived within 10 nm. This proves the LMI-based robust H∞ control feasible and usable.

Paper Details

Date Published: 2 May 2006
PDF: 6 pages
Proc. SPIE 6042, ICMIT 2005: Control Systems and Robotics, 60422T (2 May 2006); doi: 10.1117/12.664676
Show Author Affiliations
Xuxiao Hu, Zhejiang Univ. (China)
Dong Ji, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 6042:
ICMIT 2005: Control Systems and Robotics
Yunlong Wei; Kil To Chong; Takayuki Takahashi; Shengping Liu; Zushu Li; Zhongwei Jiang; Jin Young Choi, Editor(s)

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