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Proceedings Paper

High-precision time-grating displacement sensor based on harmonic wave correcting method
Author(s): Yang Wei; Donglin Peng; Xiaokang Liu; Xinghong Zhang
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Paper Abstract

Time-grating displacement sensor is a new type angular displacement sensor with initial invention. In the research of time-grating sensor, it is found that the cost of high precision only dependent on the high-precision machining and fitting technology is very high generally, and it is very difficult to achieve it. In terms of special structure of time-grating sensor including multi-probes and multi-poles, harmonic wave correcting method is firstly proposed for error correction and compensation of sensors. The data acquired system acquires data from time-grating sensor and the raster at scores of evenly spaced data points in the range of one pole synchronously. These data is input computer to achieve spectrum analysis of the error, and to obtain the best-fitting curve including the main harmonic wave component. The best-fitting curve can be utilized to correct the error curve associated with the special algorithm. Numeric experiments on time-grating sensor of different size are devised to verify the effectiveness of the method, and experimental results coming out from applications confirm the validity of the proposed method. The precision of time-grating angular displacement sensor has been improved greatly after applying this method.

Paper Details

Date Published: 20 February 2006
PDF: 7 pages
Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411Q (20 February 2006); doi: 10.1117/12.664345
Show Author Affiliations
Yang Wei, Chongqing Univ. (China)
Donglin Peng, Chongqing Institute of Technology (China)
Xiaokang Liu, Chongqing Institute of Technology (China)
Xinghong Zhang, Chongqing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6041:
ICMIT 2005: Information Systems and Signal Processing
Yunlong Wei; Kil To Chong; Takayuki Takahashi, Editor(s)

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