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Proceedings Paper

Fabricating microelectrode by electrochemical micromachining
Author(s): Zhenlong Wang; Baoguo Zhu; Guohui Cao
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Paper Abstract

Based on the present situation of microelectrode machining, electrochemical micromachining (EMM) was regarded as one of the most advanced micromachining techniques. The machining technology of microelectrode was put forward by the method of high frequency short pulses in electrochemical machining (ECM). The shaping principle of microelectrode was analyzed. Then a suitable EMM system was designed. Through the research of technologic experiments, a microelectrode is fabricated with diameter 30μm and top radius 100nm, which is made of tungsten filament. This could provide microelectrode for further electro-machining or micro probe for scanning probe microscopy. The surface property and the machining capability of the microelectrode are compared with the microelectrode fabricated by Electrical Discharge Machining (EDM) at last. The superiority of the microelectrode fabricated by ECM is showed off fully. Further research on EMM will provide more opportunities for ECM in the field of micromachining.

Paper Details

Date Published: 20 February 2006
PDF: 5 pages
Proc. SPIE 6041, ICMIT 2005: Information Systems and Signal Processing, 60411P (20 February 2006); doi: 10.1117/12.664344
Show Author Affiliations
Zhenlong Wang, Harbin Institute of Technology (China)
Baoguo Zhu, Harbin Institute of Technology (China)
Guohui Cao, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 6041:
ICMIT 2005: Information Systems and Signal Processing
Yunlong Wei; Kil To Chong; Takayuki Takahashi, Editor(s)

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