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Proceedings Paper

The design and simulation of a practical micromachined relay
Author(s): Liuqiang Zhang; Dawei Den; Qiang Wang; Jianeng Wang; Zhiyu Wen
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Paper Abstract

A practical micromachined relay, i.e. bistable electromagnetic micromachined relay, was proposed. The relay made up of three parts: movable electrode plate, plane coil chip and permanent magnet plate, which are fabricated respectively and assembled together finally. The simulation was performed for the electromagnetic field and electromagnetic force of the micromachined relay as well as the statics and harmonic response of the movable electrode. Based on the simulation results, the structure design of the relay was optimized, and the performance of the relay is evaluated.

Paper Details

Date Published: 21 March 2006
PDF: 7 pages
Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604013 (21 March 2006); doi: 10.1117/12.664185
Show Author Affiliations
Liuqiang Zhang, Chongqing Univ. (China)
Dawei Den, Chongqing Univ. (China)
Qiang Wang, Chongqing Univ. (China)
Jianeng Wang, Chongqing Univ. (China)
Zhiyu Wen, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6040:
ICMIT 2005: Mechatronics, MEMS, and Smart Materials

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