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Proceedings Paper

The study on MEMS-based micro pump technology
Author(s): Jianguo Cui; Yunlong Wei; Xiaolin Zheng; Hong Wang; Yanqing Wu
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Paper Abstract

The micropump, an important operational device of MEMS, plays a very important role in micro systems. As the micropump becomes smaller and smaller, the fabrication of the moving parts becomes more and more difficult. Therefore, many micropumps based on new principles have been developed. They are divided into two types, pumps with mechanical components and ones without them. To date, most of these micropumps are membrane-driven. The research on the micropump in the past decade is reviewed. The current status of micropump research, the structural designs and principle of operation of microfluidic controlling systems are presented in this paper. Some unresolved problems are discussed. Finally, new ideas are put forward.

Paper Details

Date Published: 21 March 2006
PDF: 5 pages
Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604012 (21 March 2006); doi: 10.1117/12.664183
Show Author Affiliations
Jianguo Cui, Chongqing Institute of Technology (China)
Chongqing Univ. (China)
Yunlong Wei, Chongqing Institute of Technology (China)
Xiaolin Zheng, Chongqing Univ. (China)
Hong Wang, Chongqing Institute of Technology (China)
Yanqing Wu, Chongqing Branch of China Coal Research Institute (China)


Published in SPIE Proceedings Vol. 6040:
ICMIT 2005: Mechatronics, MEMS, and Smart Materials
Yunlong Wei; Kil To Chong; Takayuki Takahashi; Shengping Liu; Zushu Li; Zhongwei Jiang; Jin Young Choi, Editor(s)

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