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Proceedings Paper

A new method for calculating the microstructural stiffness of MEMS devices
Author(s): Yu Liu; Zhiyu Wen; Liuqiang Zhang; Yuqian Liang
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Paper Abstract

The stiffness of microstructures is an important parameter for MEMS devices. This parameter is usually obtained by using a FEM approach, from which it is difficult to obtain an analytical expression. A microaccelerometer with a complex microstructure was designed in the present study. Its main-axial stiffness was calculated by a force method and energy method. The theoretical results are consistent with that of the FEM approach. After applying this method to the stiffness analysis of other MEMS devices, such as a micromirror, symmetric four-beam structure, and a typical combfinger capacitive microaccelerometer, it can be concluded that this methodology is applicable to the stiffness analysis of symmetric and statically indeterminate microstructures.

Paper Details

Date Published: 21 March 2006
PDF: 7 pages
Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604005 (21 March 2006); doi: 10.1117/12.664132
Show Author Affiliations
Yu Liu, Chongqing Univ. (China)
Chongqing Institute of Technology (China)
Zhiyu Wen, Chongqing Univ. (China)
Liuqiang Zhang, Chongqing Univ. (China)
Yuqian Liang, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6040:
ICMIT 2005: Mechatronics, MEMS, and Smart Materials
Yunlong Wei; Kil To Chong; Takayuki Takahashi; Shengping Liu; Zushu Li; Zhongwei Jiang; Jin Young Choi, Editor(s)

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