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Proceedings Paper

A hybrid micro-accelerometer system with CMOS readout circuit and self-test function
Author(s): Weiping Chen; Hong Chen; Xiaowei Liu; Xiaoyun Tan
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Paper Abstract

A hybrid two-chip micro-accelerometer system consisting of a novel lateral capacitive silicon micro-acceleration sensor and a CMOS readout circuit is presented. The micro-acceleration sensor has a proof mass with the size of 0.6×2.4×0.1mm3, the mass of 380 μg and the capacitive gap of 6μm, fabricated by deep reactive ion etching (DRIE) and anodic bonding, using three masks. The CMOS readout circuit with a dynamic range of 75dB, a measured capacitive sensitivity of 10.7V/pF, can offer a self-test voltage of 7V by utilizing a charge pump circuit. The hybrid-integrated system with power supply of DC5V has a measured sensitivity of 18mV/g, 1KHz frequency bandwidth and nonlinearity of 0.18% within the measured range of 50g.

Paper Details

Date Published: 21 March 2006
PDF: 5 pages
Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604004 (21 March 2006); doi: 10.1117/12.664131
Show Author Affiliations
Weiping Chen, Harbin Institute of Technology (China)
Hong Chen, Harbin Institute of Technology (China)
Xiaowei Liu, Harbin Institute of Technology (China)
Xiaoyun Tan, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 6040:
ICMIT 2005: Mechatronics, MEMS, and Smart Materials
Yunlong Wei; Kil To Chong; Takayuki Takahashi; Shengping Liu; Zushu Li; Zhongwei Jiang; Jin Young Choi, Editor(s)

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