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Proceedings Paper

Benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics (NEMO)
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Paper Abstract

In this paper we give an overview of the results obtained after benchmarking instrumentation tools for the characterization of micro-optics within the EC Network of Excellence on Micro-Optics NEMO. After a call within the NEMO network six different partners decided to organize a round robin. In this paper we will give an overview of all the experimental values obtained in the 6 different round robins, then we will comment on these results by explaining the measurement differences and the uncertainties for all measurands.

Paper Details

Date Published: 28 April 2006
PDF: 11 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618819 (28 April 2006); doi: 10.1117/12.663888
Show Author Affiliations
H. Ottevaere, Vrije Univ. Brussel (Belgium)
N. Destouches, Lab. Traitement du Signal et Instrumentation, CNRS, Univ. Jean Monnet Saint-Etienne (France)
C. Gorecki, Univ. de Franche-Comté (France)
T. Kossek, National Institute for Telecommunications (Poland)
S. Pelli, Institute of Applied Physics Nello Carrara (Italy)
R. Piramidowicz, Politechnika Wroclawska (Poland)
P. Szcepanski, Politechnika Wroclawska (Poland)
M. Kujawinska, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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