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Proceedings Paper

New generation of fully integrated optical microscopes on-chip: application to confocal microscope
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Paper Abstract

In the paper the new concept of fully integrated scanning confocal optical microscope on-chip is proposed. The operation of this microscope combines the 3-D transmissive scanning of VCSEL laser beam by use of two MOEMS scanners, and active signal detection, based on the optical feedback in the VCSEL laser cavity. The silicon-based electrostatically driven scanners provide controlled movement of two convex microlenses, working as an objective lens of microscope. Glass microlenses are monolithically integrated on movable silicon tables of scanners. The first results of technological investigation on the microscope components are presented.

Paper Details

Date Published: 21 April 2006
PDF: 9 pages
Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 618602 (21 April 2006); doi: 10.1117/12.663770
Show Author Affiliations
Sylwester Bargiel, Univ. de Franche-Comté, CNRS (France)
Lukasz Nieradko, Univ. de Franche-Comté, CNRS (France)
Michal Józwik, Univ. de Franche-Comté, CNRS (France)
Christophe Gorecki, Univ. de Franche-Comté, CNRS (France)
Jan A. Dziuban, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 6186:
MEMS, MOEMS, and Micromachining II
Hakan Ürey; Ayman El-Fatatry, Editor(s)

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