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Proceedings Paper

Laser micromachining of hybrid sol-gels: application to fabrication of micro-optical elements
Author(s): Estelle Clauss; Jean-Luc Rehspringer; Loïc Mager; Alain Fort; Joël Fontaine
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Paper Abstract

We have prepared an organic/inorganic hybrid using sol-gel process. The material exhibits thermal, mechanical and optical properties well adapted to the patterning by laser micromachining. We have achieved the fabrication of optical elements by this mean validating the process at micrometric scale. Optical waveguides have been fabricated in 3-4 micrometer thick hybrid sol-gel films deposited by spin coating on borosilicate glass substrates. Here laser ablation is used to remove matter on both sides of the waveguide core. The laser micromachining of hybrid sol-gel is also adapted to the fabrication of multilevel diffractive optical elements. Indeed, the ablation depth can be precisely controlled by the fluence of the laser and/or the number of pulses. This study demonstrates that laser micromachining of hybrid sol-gels permits the fast fabrication of effective optical devices, making this process well adapted to rapid prototyping or fabrication of masters.

Paper Details

Date Published: 17 April 2006
PDF: 8 pages
Proc. SPIE 6190, Solid State Lasers and Amplifiers II, 61901B (17 April 2006); doi: 10.1117/12.663621
Show Author Affiliations
Estelle Clauss, Lab. des Systèmes Photoniques (France)
Jean-Luc Rehspringer, Institut de Physique et Chimie des Matériaux de Strasbourg (France)
Loïc Mager, Institut de Physique et Chimie des Matériaux de Strasbourg (France)
Alain Fort, Institut de Physique et Chimie des Matériaux de Strasbourg (France)
Joël Fontaine, Lab. des Systèmes Photoniques, INSA de Strasbourg (France)


Published in SPIE Proceedings Vol. 6190:
Solid State Lasers and Amplifiers II
Alphan Sennaroglu, Editor(s)

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