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Proceedings Paper

Optical characterization of spherical microlenses: a round robin experiment within the EC Network of Excellence on Micro-Optics (NEMO)
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Paper Abstract

Today there exist different commercial and proprietary micro-optics measurement instruments for the characterization of micro-optical components and microlenses in particular. However there is often a lack of a complete quantitative optical characterization of the latter components. Therefore we will focus in this paper on the optical characterization of spherical microlenses. Moreover the results of the performed round robin within the European 6th FP Network of Excellence on Micro-optics "NEMO" will allow us to select the most appropriate instrumentation tools for characterizing refractive spherical microlenses.

Paper Details

Date Published: 28 April 2006
PDF: 9 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618818 (28 April 2006); doi: 10.1117/12.663597
Show Author Affiliations
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Johannes Schwider, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Jürgen Lamprecht, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Anna Szpak, Warsaw Univ. of Technology (Poland)
Lothar Steinbock, Forschungszentrum Karlsruhe (Germany)
Ken Weible, SUSS MicroOptics SA (Switzerland)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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