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Proceedings Paper

Fabrication, characterization, and reliability study of AlN-driven cantilevers
Author(s): A. Andrei; K. Krupa; M. Jozwik; L. Nieradko; C. Gorecki; L. Hirsinger; P. Delobelle
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Paper Abstract

The goal of this study was the investigation of reliability of AlN driven cantilevers, operating as MEMS actuators. Some of the fabrication steps being critical in regards to reliability issues, these steps have been firstly optimized. Then the monitoring of fatigue effects produced by thermal loading (130° C) of cantilevers, introducing the evolution of micromechanical parameters has been obtained by Twyman-Green interferometry. The measurements of evolution of resonance frequencies and displacement amplitudes permit the estimation of the long-term stability of such AlN based actuators.

Paper Details

Date Published: 28 April 2006
PDF: 8 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880S (28 April 2006); doi: 10.1117/12.663526
Show Author Affiliations
A. Andrei, LOPMD, FEMTO-ST (France)
K. Krupa, LOPMD, FEMTO-ST (France)
M. Jozwik, LOPMD, FEMTO-ST (France)
L. Nieradko, LOPMD, FEMTO-ST (France)
C. Gorecki, LOPMD, FEMTO-ST (France)
L. Hirsinger, LMARC, FEMTO-ST (France)
P. Delobelle, LMARC, FEMTO-ST (France)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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