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Proceedings Paper

Fabrication technique of nanograting using AFM
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Paper Abstract

On the basis of the mechanically scratching using the Atomic Force Microscope, this paper proposes a new method for manufacturing high frequency grating. The grating was fabricated on a polycarbonate compact disc with a silicon AFM tip under the contact mode. The fabrication technique and the optimization of parameters for the technique are discussed in detail. From the experiment, the minimum spacing of the grating can reach 30 nm. The digital nano-moire patterns verify that the grating has good potential to be applied to the nano-deformation measurement.

Paper Details

Date Published: 27 April 2006
PDF: 6 pages
Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 618807 (27 April 2006); doi: 10.1117/12.663058
Show Author Affiliations
Huimin Xie, Tsinghua Univ. (China)
Zhanwei Liu, Beijing Institute of Technology (China)
Ming Zhang, Tsinghua Univ. (China)
Wei Zhang, Tsinghua Univ. (China)
Anand Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 6188:
Optical Micro- and Nanometrology in Microsystems Technology
Christophe Gorecki; Anand K. Asundi; Wolfgang Osten, Editor(s)

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